q=%E4%B8%AD%E5%9B%BD%E7%94%B5%E5%AD%90%E5%AD%A6%E4%BC%9A%E5%8D%8A%E5%AF%BC%E4%BD%93%E4%B8%8E%E9%9B%86%E6%88%90%E6%8A%80%E6%9C%AF%E7%94%B5%E5%AD%90%E6%9D%90%E6%96%99%E5%AD%A6%E4%B8%93%E4%B8%9A%E5%AD%A6%E4%BC%9A%E7%BC%96%E5%8D%B0&searchType=standard&isFacet=true&view=standard&rows=10&sortWay=score&sortOrder=desc&searchWay0=marc&logical0=AND
rows=10&searchWay0=marc&logical0=AND
中国电子学会半导体与集成技术电子材料学专业学会编印